Title :
Diaphragm-type miniature optical fiber pressure sensor with a sleeve
Author :
Watanabe, T. ; Kaneko, Yuya ; Shimada, Masanobu ; Takahashi, K.
Author_Institution :
Dept. of Electr. & Electron. Syst., Saitama Univ., Japan
Abstract :
A diaphragm-type optical fiber pressure sensor, which has a sleeve for fiber insertion, is proposed and the fundamental characteristic of this sensor is demonstrated. The diaphragm with the sleeve is suitable for highly reliable and easy bonding between the sleeve and the optical fiber. The light intensity changes through a Fabry-Perot interferometer according to the pressure observed. A method for mass production of the developed diaphragm will be useful to realize a low cost pressure sensor.
Keywords :
Fabry-Perot interferometers; fibre optic sensors; micromachining; microsensors; pressure sensors; Fabry-Perot interferometer; diaphragm-type optical fiber pressure sensor; fabrication process; fiber insertion sleeve; Bonding; Mirrors; Optical device fabrication; Optical fiber sensors; Optical fibers; Optical reflection; Optical sensors; Pressure measurement; Sensor phenomena and characterization; Sensor systems;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on
Print_ISBN :
0-7803-8994-8
DOI :
10.1109/SENSOR.2005.1496460
