Applying MEMS technology to field, flight and space deployable systems

Over the last few years, there has been a rapid growth in Microelectro-Mechanical Systems (MEMS) technologies, on board intelligent technologies and smaller, faster, and smarter wireless telemetry systems technologies that can reduce cycle time and total measurement and test process cost. The major attraction of MEMS technology is the order of magnitude reduction of the power and thermal requirements over existing electronic components. In addition, the size and power requirements have also made them attractive for wind tunnel tests, field-deployable acoustic measurement systems, flight, and space applications. Recent advances in MEMS technology have made it possible to produce pressure, acceleration, humidity, and temperature sensors having masses in the milligram range or even lighter.In this paper, characteristics of MEMS devices for propulsion systems, meteorological instrumentation, and space applications are presented