Title :
SOI micromachined 5-axis motion sensor using resonant electrostatic drive and non-resonant capacitive detection mode
Author :
Watanabe, Yoshiyuki ; Mitsui, Toshiaki ; Mineta, Takashi ; Matsu, Yoshiyuki ; Okada, Kazuhiro
Author_Institution :
MEMS Lab., Yamagata Res. Inst. of Technol., Japan
Abstract :
The paper presents a 5-axis motion sensor which can detect 3-axis acceleration and 2-axis angular rate capacitively. The sensor is fabricated by SOI bulk-micromachining, and is vacuum scaled by anodic bonding and activation of the non-evaporated getters. The sensor chip size is 5.0×5.0×1.7 mm3. By applying a Z-axis reference vibration to a proof mass with an electrostatic force at resonant frequency, 5-axis motions can be detected capacitively in a non-resonant detection mode. Measured sensitivities of X-, Y- and Z-axis acceleration were 1.9, 1.1 and 4.7 V/G, respectively. X-and Y-axis angular rate sensitivities were 6.7 and 12 mV/(deg/s), respectively.
Keywords :
acceleration measurement; bonding processes; capacitive sensors; electrostatic actuators; getters; micromachining; micromechanical resonators; microsensors; motion measurement; sensitivity; silicon-on-insulator; vibrations; 1.7 mm; 5.0 mm; SOI micromachined 5-axis motion sensor; Z-axis reference vibration; acceleration detection; angular rate detection; anodic bonding; bulk-micromachining; electrostatic force; nonevaporated getters; nonresonant capacitive detection; proof mass; resonant electrostatic drive; resonant frequency; sensitivity; Acceleration; Bonding; Capacitive sensors; Electrostatic measurements; Force sensors; Gettering; Motion detection; Resonance; Resonant frequency; Semiconductor device measurement;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on
Print_ISBN :
0-7803-8994-8
DOI :
10.1109/SENSOR.2005.1496466
