Title :
A new height-adjustable aeroMEMS surface fence probe fabricated in SOI technology for high resolution wall shear stress measurement in turbulent flows
Author :
Schiffer, M. ; Obermeier, E. ; Grewe, F. ; Ebner, A. ; Fernholz, H.H.
Author_Institution :
Microsensor & Actuator Technol., Tech. Univ. of Berlin, Germany
Abstract :
A sophisticated sensor design of the aeroMEMS surface fence probe for wall shear stress measurements in turbulent flow is presented. The fence deflection (proportional to the wall shear stress) is directly measured by a piezoresistive Wheatstone bridge. The fence is 5 mm wide, 700 μm (max.) high and 7 μm and 13 μm thick, respectively. The cantilever height is 1700 μm or 2200 μm. The sensing element rests on a silicon body of 5200×7500 μm2. A sensitivity up to 6 mV/(V·N/m2), a resolution of up to 10-4 N/m2 and a symmetrical behavior for bidirectional measurements was obtained in a measurement range of ±0.3 N/m2. Two pn-diodes were implemented for temperature monitoring (sensitivity: -2 mV/K @ 100 μA).
Keywords :
micromachining; microsensors; piezoresistive devices; sensitivity; shear flow; silicon-on-insulator; stress effects; stress measurement; turbulence; 0.3 N/m2; 100 muA; 7 to 7500 micron; SOI technology; Si; cantilever height; fence deflection; height-adjustable aeroMEMS surface fence probe; high resolution wall shear stress measurement; piezoresistive Wheatstone bridge; pn-diodes; silicon body; temperature monitoring; turbulent flow; Actuators; Bridge circuits; Conductors; Piezoresistance; Piezoresistive devices; Pressure measurement; Probes; Silicon; Stress measurement; Temperature sensors;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on
Print_ISBN :
0-7803-8994-8
DOI :
10.1109/SENSOR.2005.1496489
