Title :
Frequency and transient analysis of micromachined U-shaped cantilever devices for magnetic field measurement
Author :
Keplinger, Franz ; Beigelbeck, Roman ; Kohl, Franz ; Kvasnica, Samuel ; Jachimowicz, Artur ; Jakoby, Bemhard
Author_Institution :
Inst. of Sensor & Actuator Syst., Vienna Univ. of Technol., Austria
Abstract :
Utilizing the symmetrical and the antisymmetrical vibration modes of a micromachined U-shaped cantilever, a magnetic field sensor, allowing the simultaneous measurement of two orthogonal field components, can be produced. This device enables the measurement of magnetic flux densities over seven decades (starting from about 10-6 T). We discuss analytical models describing various cantilever vibration modes and their verification by a device prototype.
Keywords :
magnetic field measurement; magnetic sensors; micromachining; microsensors; transient analysis; vibrations; antisymmetrical vibration modes; cantilever vibration modes; magnetic field measurement; magnetic field sensor; magnetic flux densities; micromachined U-shaped cantilever devices; symmetrical vibration modes; Actuators; Arm; Density measurement; Frequency; Gold; Magnetic field measurement; Magnetic sensors; Sensor systems; Transient analysis; Vibration measurement;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on
Print_ISBN :
0-7803-8994-8
DOI :
10.1109/SENSOR.2005.1496496
