Title :
Enhanced functionality of cantilever based mass sensors using higher modes and functionalized particles
Author :
Dohn, Soren ; Sandberg, Rasmus ; Svendsen, Winnie ; Boisen, Anja
Author_Institution :
Dept. of Micro & Nanotechnology, Tech. Univ. Denmark, Lyngby, Denmark
Abstract :
By positioning a single gold-particle at different locations along the length axis on a cantilever based mass sensor, we have investigated the effect of mass position on the mass responsivity and compared the results to simulations. A significant improvement in quality factor and responsivity was achieved by operating the cantilever in the 4th bending mode, thereby increasing the intrinsic sensitivity. It is shown that the use of higher bending modes grants a spatial resolution and thereby enhances the functionality of the cantilever based mass sensor.
Keywords :
Q-factor; mass measurement; microsensors; sensitivity; cantilever based mass sensors; fourth bending mode; gold-particle; intrinsic sensitivity; mass position; mass responsivity; quality factor; spatial resolution; Actuators; Effective mass; Nanoscale devices; Nanotechnology; Q factor; Resonance; Resonant frequency; Sensor systems and applications; Spatial resolution; Stress;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on
Print_ISBN :
0-7803-8994-8
DOI :
10.1109/SENSOR.2005.1496497
