Micromachined array microjet for inhalation drug therapy

This paper presents a novel array microjet for inhalation drug therapy (IDT). Compared with other atomizing devices, the MEMS based array microjets have smaller droplet size and a more narrow size distribution. The microjet adopts the piezoelectric transducer as the actuator. The vibration of the piezoelectric transducer generates a pressure wave in the liquid chamber, and the liquid is squeezed out of the array nozzles by the pressure to form droplets. This paper presents the design, simulation, manufacturing and experiment results of the microjet.