Author_Institution :
Microelectron. Res. Center, Georgia Inst. of Technol., Atlanta, GA, USA
Abstract :
In order to facilitate research on a variety of new materials, device structures, and microelectromechanical systems, the Microelectronics Research Center of Georgia Tech has established silicon CMOS processing baselines. Together with a rigorous equipment and process training procedure, a research collaboration and service protocol, and a group of dedicated people, a research platform has been formed based on the silicon CMOS processing baselines. The platform provides a rigorous equipment and process training program for new cleanroom users, a quarterly CMOS processing run to meet the need of CMOS related research projects, and process module services as needed for general research communities. The platform also collaborates with a variety of groups to perform cutting-edge research such as novel CMOS devices, novel structures, electronics for MEMS, chemical sensor integrated optoelectronics, DNA chip array, new interconnection schemes, and sea of leads chip input/output interconnects. This paper describes the five basic components and their integration into the platform
Keywords :
CMOS integrated circuits; biosensors; chemical sensors; electronic engineering education; integrated circuit interconnections; integrated circuit manufacture; integrated circuit metallisation; integrated circuit technology; integrated optoelectronics; micromechanical devices; research initiatives; training; CMOS MEMS electronics; CMOS devices; CMOS processing run; CMOS related research projects; CMOS structures; CMOS technology research platform; DNA chip array; Georgia Tech; Microelectronics Research Center; chemical sensor integrated optoelectronics; cleanroom users; device structures; equipment training procedure; interconnection schemes; microelectromechanical systems; process module services; process training procedure; process training program; research collaboration; research communities; research platform; sea of leads chip input/output interconnects; service protocol; silicon CMOS processing baselines; CMOS process; Chemical sensors; Collaboration; Integrated optoelectronics; Microelectromechanical systems; Microelectronics; Micromechanical devices; Protocols; Sensor arrays; Silicon;
