Title :
Alternative fabrication methods for capillary electrophoretic device manufacturing
Author :
Conklin, John A. ; Crain, Mark M. ; Pai, Rekha S. ; Martin, M. ; Pitts, K. ; Roussel, Thomas J. ; Jackson, Doug J. ; Baldwin, Richard P. ; Keynton, Robert S. ; Naber, John F. ; Walsh, Kevin M.
Author_Institution :
Dept. of Electr. Eng., Louisville Univ., KY, USA
fDate :
6/23/1905 12:00:00 AM
Abstract :
This work represents research that explores the development of novel manufacturing methods to create microcapillary electrophoretic (CE) devices. Nontraditional substrates that were investigated include polymers such as SU-8, poly dimethylsiloxane (PDMS), acetate, Riston, Kapton, polyimide, and polyester. Hot embossing, chemical etching, micro-molding, wafer level bonding, chemical treatment, and lamination techniques were developed for these substrates. The purpose of this paper is to explore the feasibility of micromachining a select group of alternative materials
Keywords :
capillarity; electrophoresis; etching; laminates; microfluidics; micromachining; moulding; polymers; surface treatment; wafer bonding; Kapton; PDMS; Riston; SU-8; acetate; capillary electrophoretic device manufacturing; chemical etching; chemical treatment; fabrication methods; hot embossing; lamination techniques; manufacturing method development; micro-molding; microcapillary electrophoretic devices; micromachining; poly dimethylsiloxane; polyester; polyimide; polymer substrates; wafer level bonding; Chemicals; Embossing; Etching; Fabrication; Lamination; Manufacturing; Micromachining; Polyimides; Polymers; Wafer bonding;
Conference_Titel :
University/Government/Industry Microelectronics Symposium, 2001. Proceedings of the Fourteenth Biennial
Conference_Location :
Richmond, VA
Print_ISBN :
0-7803-6691-3
DOI :
10.1109/UGIM.2001.960299
