Fabrication and testing of three-dimensional stages providing displacement of up to 8 μm

Author

Ando, Yasuhisa

Author_Institution

Adv. Manuf. Res. Inst., Nat. Inst. of Adv. Ind. Sci. & Technol., Ibaraki, Japan

Volume

1

fYear

2005

Firstpage

741

Abstract

We have designed and fabricated 3D stages driven by electrostatic comb actuators, which are to be substituted for a PZT tube scanner in a scanning probe microscope (SPM) system. The 3D stage consisted of traveling tables, suspensions and comb actuators, which were fabricated in 20 μm-silicon-layer on an SOI (silicon on insulator) wafer using a DRIE (deep reactive ion etching) process. The DRIE process was also used to form inclined leaf springs in the suspensions. The 3D stage was installed in a commercial SPM system, and surface topography measurements were carried out to determine the performance.

Keywords

displacement control; electrostatic actuators; micropositioning; scanning probe microscopy; silicon-on-insulator; springs (mechanical); sputter etching; 20 micron; 3D displacement stages; 8 micron; DRIE; SOI; SPM; deep reactive ion etching; electrostatic comb actuators; inclined leaf springs; scanning probe microscope; surface topography; suspensions; traveling tables; Atomic force microscopy; Electrostatic actuators; Fabrication; Manufacturing; Scanning probe microscopy; Springs; Surface topography; Suspensions; System testing; Tunneling;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on

Print_ISBN

0-7803-8994-8

Type

conf

DOI

10.1109/SENSOR.2005.1496523

Filename

1496523