Title :
Micromachined millimeter-wave technology
Author :
Saint-Etienne, E. ; Guillon, B. ; Pons, P. ; Blasquez, G. ; Parra, T. ; Blondy, P. ; Lalaurie, J.C. ; Plana, R. ; Graffeui, J.
Author_Institution :
Univ. Paul Sabatier, Toulouse, France
Abstract :
In this paper, we propose a new technological process derived from LIGA which allows one to realise micromachined millimeter-wave circuits. We have realised a coplanar transmission line featuring transmission loss lower than 0.3 dB and a band pass filter in the 30 GHz range featuring 1 dB loss and a bandwidth of 17 GHz
Keywords :
MIMIC; band-pass filters; coplanar waveguides; integrated circuit technology; micromachining; millimetre wave filters; passive filters; waveguide filters; 0.3 dB; 1 dB; 17 GHz; 30 GHz; CPW; EHF; LIGA; MIMIC; MM-wave IC; band pass filter; coplanar transmission line; micromachined MM-wave technology; millimeter-wave circuits; Band pass filters; Biomembranes; Dielectric constant; Dielectric devices; Dielectric losses; Dielectric substrates; Millimeter wave circuits; Millimeter wave technology; Propagation losses; Silicon;
Conference_Titel :
Microelectronics, 1997. Proceedings., 1997 21st International Conference on
Conference_Location :
Nis
Print_ISBN :
0-7803-3664-X
DOI :
10.1109/ICMEL.1997.632892
