• DocumentCode
    1721403
  • Title

    Modeling a network of MEMS fabrication sites

  • Author

    Benard, William L. ; Huff, Michael A.

  • Author_Institution
    Dept. of Electr. & Comput. Eng., Carnegie Mellon Univ., Pittsburgh, PA, USA
  • fYear
    2001
  • fDate
    6/23/1905 12:00:00 AM
  • Firstpage
    171
  • Lastpage
    178
  • Abstract
    The MEMS Exchange is a network of MEMS fabrication facilities, wherein wafers are allowed to be processed at multiple sites to provide customers with access to an extremely diverse set of processing capabilities in a very flexible manner. This framework for fabrication of MEMS devices is an instance of a new manufacturing paradigm, which is capable of delivering mass product customization. In two and half years of operation, the MEMS Exchange has completed over 160 custom runs. Data is captured as part of the course of routine MEMS Exchange operations. This data forms the foundation for the models being developed for due date estimation and system capacity management. A discrete event simulation has been written to model fab behavior for varying load and staff availability. This simulator is being used to establish an optimal scheduling algorithm for the manufacturing nodes in order to maximize the network throughput
  • Keywords
    discrete event simulation; flexible manufacturing systems; manufacturing resources planning; micromachining; micromechanical devices; production control; semiconductor process modelling; MEMS Exchange; MEMS Exchange operations; MEMS device fabrication framework; MEMS fabrication facilities; MEMS fabrication site network modeling; data capture; discrete event simulation; due date estimation; fab behavior modeling; manufacturing nodes; manufacturing paradigm; mass product customization; multiple sites; network throughput; optimal scheduling algorithm; processing capabilities; staff availability; system capacity management; wafer processing; Discrete event simulation; Fabrication; Microelectromechanical devices; Micromechanical devices; Optimal scheduling; Product customization; Scheduling algorithm; Semiconductor device modeling; Throughput; Virtual manufacturing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    University/Government/Industry Microelectronics Symposium, 2001. Proceedings of the Fourteenth Biennial
  • Conference_Location
    Richmond, VA
  • ISSN
    0749-6877
  • Print_ISBN
    0-7803-6691-3
  • Type

    conf

  • DOI
    10.1109/UGIM.2001.960324
  • Filename
    960324