• DocumentCode
    1721580
  • Title

    High performance poly-si thin film transistors (TFTs) fabricated by xecl excimer laser annealing without post-hydrogenation

  • Author

    Talwar, Somit ; Cao, Min ; Kramer, K. Josef ; Verma, Gaurav ; Saraswat, Krishna C. ; Sigmon, Thomas W.

  • Author_Institution
    Stanford University
  • fYear
    1994
  • fDate
    6/16/1905 12:00:00 AM
  • Firstpage
    49
  • Lastpage
    50
  • Keywords
    Annealing; Gas lasers; Leakage current; MOS devices; Optical pulses; Plasma displays; Plasma temperature; Pulsed laser deposition; Thermal conductivity; Thin film transistors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Device Research Conference, 1994. 52nd Annual
  • Type

    conf

  • DOI
    10.1109/DRC.1994.1009411
  • Filename
    1009411
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1721580