NWELL CMOS fabrication process for the Virginia Microelectronics Center

Author

Balderson, Nicholas R. ; Cordova, Giovanni ; Yi, Kwang ; Guliani, Ann ; Manek, Shruti ; Schiavone, Guy W. ; Harrison, Joel ; Pearson, Robert E.

Author_Institution

Dept. of Electr. Eng., Virginia Commonwealth Univ., Richmond, VA, USA

fYear

2001

fDate

6/23/1905 12:00:00 AM

Firstpage

209

Lastpage

212

Abstract

The VMC is developing a CMOS process to help teach microelectronics students the techniques of semiconductor fabrication. It is also intended to be a vehicle for the implementation of VLSI digital and analog circuit designs at VCU. The development of the CMOS process is an on-going senior electrical engineering project. The long-term goal is to fabricate and test CMOS devices entirely in the VMC. To achieve this goal, we must construct a process flow, design a mask set, understand the fundamentals of basic test chip circuit layout design, and become educated on process tool operations. This project is being completed by building upon the n-well test chip layout developed at Rochester Institute of Technology

Keywords

CMOS integrated circuits; electronic engineering education; integrated circuit design; integrated circuit manufacture; integrated circuit technology; integrated circuit testing; semiconductor technology; CMOS devices; CMOS process; NWELL CMOS fabrication process; Rochester Institute of Technology; VLSI analog circuit designs; VLSI digital circuit designs; Virginia Microelectronics Center; mask set design; microelectronics students; n-well test chip layout; process flow; process tool operations; semiconductor fabrication techniques; senior electrical engineering project; test chip circuit layout design; Analog circuits; Buildings; CMOS process; Circuit testing; Electrical engineering; Fabrication; Microelectronics; Process design; Vehicles; Very large scale integration;

fLanguage

English

Publisher

ieee

Conference_Titel

University/Government/Industry Microelectronics Symposium, 2001. Proceedings of the Fourteenth Biennial

Conference_Location

Richmond, VA

ISSN

0749-6877

Print_ISBN

0-7803-6691-3

Type

conf

DOI

10.1109/UGIM.2001.960332

Filename

960332