Concrete the aligned CNT-films

Author

Chu, Huai-Yuan ; Chang, Tso-Chi ; Hsu, Wen-Kuang ; Fang, Weileun

Author_Institution

Dept. of Power Mech. Eng., Nat. Tsing Hua Univ., Hsinchu, Taiwan

Volume

1

fYear

2005

Firstpage

863

Abstract

This study has demonstrated the idea of concreting aligned CNT-films using a chemical vapor deposited (CVD) polymer film, so as to form a "CNT-polymer" composite-film. The mechanical properties of the aligned CNT-film and the "CNT-polymer" composite-film are characterized. The experimental results show that the elastic modulus and hardness of the composite-film are much greater than those of the aligned CNT-films. This study also established a process to fabricate suspended MEMS structures using this composite-film. Thus the "CNT-polymer" composite-film could be a potential material for MEMS.

Keywords

carbon nanotubes; chemical vapour deposition; composite materials; elastic moduli; hardness; polymer films; thin films; CNT-polymer composite-film; CVD polymer film; aligned CNT-films; carbon nanotube films; chemical vapor deposited polymer film; elastic modulus; hardness; suspended MEMS structure fabrication; Chemical vapor deposition; Concrete; Fabrication; Iron; Mechanical factors; Micromechanical devices; Polymer films; Scanning electron microscopy; Silicon; Substrates;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on

Print_ISBN

0-7803-8994-8

Type

conf

DOI

10.1109/SENSOR.2005.1496554

Filename

1496554