Real time observation of micromachined field emission tips using transmission electron microscope

Author

Kakushima, Kuniyuki ; Hashiguchi, Gen ; Ataka, Manabu ; Toshiyoshi, Hiroshi ; Fujita, Hiroyuki

Author_Institution

Inst. of Ind. Sci., Univ. of Tokyo, Japan

Volume

1

fYear

2005

Firstpage

867

Abstract

Micromachined opposing sharp silicon tips with spacing of 100 nm were fabricated using anisotropic etching. Field emission between the tips was performed with in-situ observation of the tips using a transmission electron microscope (TEM). Anode tip shape deformation in the few nanometer region was observed at high current density, while the cathode remain unchanged. The mechanism of energy exchange is explained using a field emission cooling mechanism.

Keywords

anodes; current density; etching; field emitter arrays; micromachining; transmission electron microscopy; 100 nm; Si; TEM; anisotropic etching; anode tip shape deformation; cathode tip; energy exchange mechanism; field emission arrays; field emission cooling mechanism; field emission tip real time observation; high current density; lateral field emission device; opposing sharp tips; transmission electron microscope; Anisotropic magnetoresistance; Anodes; Cathodes; Current density; Electron emission; Energy exchange; Etching; Shape; Silicon; Transmission electron microscopy;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on

Print_ISBN

0-7803-8994-8

Type

conf

DOI

10.1109/SENSOR.2005.1496555

Filename

1496555