Title :
Novel capacitor-less high density low power vertical memory
Author :
Tiwari, Sandip ; Hanafi, H. ; Hartstein, A. ; Crabbe ; Powell, A.R. ; Iyer, S.S. ; Tierney, E.
Author_Institution :
IBM Research Division, T. J. Watson Research Center
fDate :
6/16/1905 12:00:00 AM
Keywords :
Capacitors; Electrons; Epitaxial growth; Etching; Nonvolatile memory; Semiconductor films; Silicon; Threshold voltage; Transmission line matrix methods; Tunneling;
Conference_Titel :
Device Research Conference, 1994. 52nd Annual
DOI :
10.1109/DRC.1994.1009423
