Title :
Short channel immunity and current drive capabilities of recessed mosfets in the sub-50 mn regime
Author :
Dubois, Emmanuel ; Bricout, Paul Henn
Author_Institution :
IEMN/ISEN
fDate :
6/16/1905 12:00:00 AM
Keywords :
Controllability; Doping; FETs; Geometry; MOSFETs; Power dissipation; Silicon; Solid modeling; Threshold voltage; Voltage control;
Conference_Titel :
Device Research Conference, 1994. 52nd Annual
DOI :
10.1109/DRC.1994.1009426
