Title :
Test structures applied to the rapid prototyping of sensors
Author :
Buehler, M.G. ; Cheng, L.-J. ; Martin, D.P.
Author_Institution :
Jet Propulsion Lab., California Inst. of Technol., Pasadena, CA, USA
Abstract :
A multi-project ceramic substrate was used in developing a gas sensor and pressure sensor. The co-fired ceramic substrate contained 36 chips with six variants including sensors, process control monitors, and an interconnect chip. The gas sensor is being developed as an air quality monitor for the Space Shuttle and the pressure gauge as a Martian barometer. This effort is in its initial phase. The test structures were used to identify problems and to point to solutions
Keywords :
aerospace instrumentation; astronomical instruments; gas sensors; meteorological instruments; pressure sensors; testing; Martian barometer; Space Shuttle; air quality monitor; gas sensor; interconnect chip; multi-project co-fired ceramic substrate; pressure gauge; pressure sensor; process control monitor; rapid prototyping; test structure; Ceramics; Circuit testing; Dielectric substrates; Electrical resistance measurement; Gas detectors; Laboratories; Process control; Prototypes; Resistors; Sensor phenomena and characterization;
Conference_Titel :
Microelectronic Test Structures, 1997. ICMTS 1997. Proceedings. IEEE International Conference on
Conference_Location :
Monterey, CA
Print_ISBN :
0-7803-3243-1
DOI :
10.1109/ICMTS.1997.589406
