Title :
Metal-semiconductor-metal photodiodes on textured silicon membranes
Author :
Lee, Henry C. ; Zeghbroeck, Bart Van
Author_Institution :
University of Colorado
fDate :
6/16/1905 12:00:00 AM
Keywords :
Absorption; Bandwidth; Biomembranes; Detectors; Fabrication; Optical computing; Optical fiber communication; Photodetectors; Photodiodes; Silicon;
Conference_Titel :
Device Research Conference, 1994. 52nd Annual
DOI :
10.1109/DRC.1994.1009442
