Metal-semiconductor-metal photodiodes on textured silicon membranes

Author

Lee, Henry C. ; Zeghbroeck, Bart Van

Author_Institution

University of Colorado

fYear

1994

fDate

6/16/1905 12:00:00 AM

Firstpage

129

Lastpage

130

Keywords

Absorption; Bandwidth; Biomembranes; Detectors; Fabrication; Optical computing; Optical fiber communication; Photodetectors; Photodiodes; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Device Research Conference, 1994. 52nd Annual

Type

DOI

10.1109/DRC.1994.1009442

Filename

1009442

Link To Document