Title :
SiGe/Si resonant cavity photodetector
Author :
Murtaza, S.S. ; Campbell, J.C. ; Bean, J.C. ; Peticolas, L.J.
Author_Institution :
The University of Texas at Austin
fDate :
6/16/1905 12:00:00 AM
Keywords :
Absorption; Bandwidth; Germanium silicon alloys; III-V semiconductor materials; Mirrors; Photodetectors; Photodiodes; Reflectivity; Resonance; Silicon germanium;
Conference_Titel :
Device Research Conference, 1994. 52nd Annual
DOI :
10.1109/DRC.1994.1009443