Title :
A discrete positioning microactuator: linearity modeling and VOA application
Author :
Man Geun Kim ; Jong Hyun Lee
Author_Institution :
Dept. of Mechatronics, Gwangju Inst. of Sci. & Technol., South Korea
Abstract :
We proposed a discrete microactuator enabling a desirable nonlinear displacement with respect to digital input. Curved comb electrodes were employed to linearize the attenuation of a variable optical attenuator (VOA) with a constant step of 0.5 dB. The experimental insertion loss (IL) was 1.1 dB and attenuation range was 32.6 dB with 4.2% in linearity.
Keywords :
electrostatic actuators; micro-optics; micromachining; optical attenuators; optical communication equipment; 1.1 dB; attenuation range; curved comb electrodes; digital input; discrete microactuator; discrete positioning microactuator; electrostatic force; fabrication; fiber-optical communication technology; insertion loss; linearity modeling; nonlinear displacement; variable optical attenuator; Electrodes; Fiber nonlinear optics; Linearity; Microactuators; Nonlinear optics; Optical attenuators; Optical distortion; Shape; Stimulated emission; Voltage;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on
Conference_Location :
Seoul, South Korea
Print_ISBN :
0-7803-8994-8
DOI :
10.1109/SENSOR.2005.1496620
