Title :
Pressure-sensitive field-effect transistor sensor array fabricated from a piezoelectric polyvinylidene fluoride film
Author :
Reston, Rocky R. ; Kolesar, Edward S.
Author_Institution :
Dept. of Electr. & Comput. Eng., US Air Force Inst. of Technol., Dayton, OH, USA
Abstract :
A tactile sensor was fabricated from piezoelectric polyvinylidene fluoride (PVDF) films coupled to a silicon wafer substrate containing an array of MOSFETs. The integrated circuit incorporated 25 sensor elements arranged in a 5×5 grid. Sensor configurations using varying thickness of PVDF film were fabricated, and the individual elements of each configuration were evaluated. The sensor based on the 25-μm-thick PVDF film was judged to be the optimal sensor configuration because of its bias response time and its linear operation over the load range tested. No significant coupling between nearest-neighbor sensor elements was observed
Keywords :
MOS integrated circuits; biosensors; piezoelectric transducers; polymer films; tactile sensors; 25 micron; MOSFET array; PVDF; Si; Si wafer substrate; bias response time; linear operation; load range; optimal sensor configuration; piezoelectric polyvinylidene fluoride film; pressure sensitive FET sensor array; robots; tactile sensor; Coupling circuits; FETs; MOSFETs; Piezoelectric films; Semiconductor films; Sensor arrays; Silicon; Substrates; Tactile sensors; Thick film sensors;
Conference_Titel :
Engineering in Medicine and Biology Society, 1989. Images of the Twenty-First Century., Proceedings of the Annual International Conference of the IEEE Engineering in
Conference_Location :
Seattle, WA
DOI :
10.1109/IEMBS.1989.96047
