Title :
A shunt-type RF MEMS switch at 3.3V operation actuated by Lorentz force and electrostatic hold
Author :
Cho, Il-Joo ; Song, Taeksang ; Baek, Sang-Hyun ; Yoon, Euisik
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., Korea Adv. Inst. of Sci. & Technol., Daejeon, South Korea
Abstract :
In this paper, we have proposed and fabricated a new shunt-type RF MEMS switch actuated by a combination of Lorentz force and electrostatic hold for low power consumption and low voltage operation. There is no static power consumption because it only consumes power when changing state. The proposed switch can be operated with large actuation force and it can enhance power handling capability and mechanical stability. The fabricated switch is actuated with an applied current of 49 mA and the actuation voltage is 3.3 V. Also, the power consumption is 87.9 μJ per switching.
Keywords :
electromagnetic actuators; electrostatic actuators; microswitches; 3.3 V; 49 mA; 87.9 muJ; Lorentz force actuation; RF MEMS switches; electromagnetic force actuation; electrostatic actuation; electrostatic hold; low power consumption; low voltage operation; mechanical stability; shunt-type switch; Biomembranes; Coils; Electromagnetic forces; Electrostatics; Energy consumption; Lorentz covariance; Low voltage; Radio frequency; Radiofrequency microelectromechanical systems; Switches;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on
Print_ISBN :
0-7803-8994-8
DOI :
10.1109/SENSOR.2005.1496636
