A shunt-type RF MEMS switch at 3.3V operation actuated by Lorentz force and electrostatic hold

Author

Cho, Il-Joo ; Song, Taeksang ; Baek, Sang-Hyun ; Yoon, Euisik

Author_Institution

Dept. of Electr. Eng. & Comput. Sci., Korea Adv. Inst. of Sci. & Technol., Daejeon, South Korea

Volume

1

fYear

2005

Firstpage

1051

Abstract

In this paper, we have proposed and fabricated a new shunt-type RF MEMS switch actuated by a combination of Lorentz force and electrostatic hold for low power consumption and low voltage operation. There is no static power consumption because it only consumes power when changing state. The proposed switch can be operated with large actuation force and it can enhance power handling capability and mechanical stability. The fabricated switch is actuated with an applied current of 49 mA and the actuation voltage is 3.3 V. Also, the power consumption is 87.9 μJ per switching.

Keywords

electromagnetic actuators; electrostatic actuators; microswitches; 3.3 V; 49 mA; 87.9 muJ; Lorentz force actuation; RF MEMS switches; electromagnetic force actuation; electrostatic actuation; electrostatic hold; low power consumption; low voltage operation; mechanical stability; shunt-type switch; Biomembranes; Coils; Electromagnetic forces; Electrostatics; Energy consumption; Lorentz covariance; Low voltage; Radio frequency; Radiofrequency microelectromechanical systems; Switches;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on

Print_ISBN

0-7803-8994-8

Type

conf

DOI

10.1109/SENSOR.2005.1496636

Filename

1496636