Title :
Spark erosion for fabrication of micromechanical components-evaluation of possibilities and limits
Author :
Herbst, P. ; Popovic, G. ; Detter, H. ; Brenner, W. ; Petrovic, D. ; Delic, N. ; Vujanic, A.
Author_Institution :
Wien Univ., Austria
Abstract :
In recent years spark erosion (EDM) has increased to a high precision machining technology and a powerful tool for fabrication of microstructures. The improvements are as a result of systematic research of different electrode materials, influences of various dielectric liquids on the erosion process, as well as due to improved control and machine features. This paper gives an overview of the characteristics, possibilities and limits of Spark Erosion (Electro Discharge Machining) in the field of microstructuring
Keywords :
microelectrodes; micromachining; micromechanical devices; spark machining; dielectric liquids; electrode materials; electrodischarge machining; erosion process; high precision machining technology; machine features; micromechanical components; spark erosion; Anodes; Dielectrics; Electrodes; Fabrication; Ignition; Machining; Micromechanical devices; Microstructure; Sparks; Surface discharges;
Conference_Titel :
Microelectronics, 1997. Proceedings., 1997 21st International Conference on
Conference_Location :
Nis
Print_ISBN :
0-7803-3664-X
DOI :
10.1109/ICMEL.1997.632900
