Title :
Proceedings IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Robotic Systems
Keywords :
fluidics; microactuators; microassembling; micromechanical devices; micropumps; microsensors; robots; actuators; buckling; damping; etching; fabrication methods; fluidics; materials; micro robotics; micro-fluid handling; microassembly; microelectromechanical systems; modeling; sensors; teleoperation;
Conference_Titel :
Micro Electro Mechanical Systems, 1994, MEMS '94, Proceedings, IEEE Workshop on
Conference_Location :
Oiso, Japan
Print_ISBN :
0-7803-1833-1
DOI :
10.1109/MEMSYS.1994.555586
