Title :
System integration of high voltage electrostatic MEMS actuators
Author :
Saheb, Jean-François ; Richard, Jean-François ; Meingan, R. ; Sawan, M. ; Savaria, Y.
Author_Institution :
Design & Product Foundry Service, DALSA Semicond. Inc., Bromont, Que., Canada
Abstract :
A system integration for high voltage (HV) electrostatic microelectromechanical systems (MEMS) actuators is introduced on a micro-printed circuit board (PCB). The system includes a programmable microcontroller, a programmable DC/DC converter, a multi output HV interface and electrostatic MEMS actuators. The system produces high output voltages (10-300V) and can control a large variety of MEMS capacitive loads (1 to 50pF) by combining diverse technologies. This system proves that technologies, such as low voltage CMOS of different processes, high voltage DMOS and MEMS, can interact, communicate and even be integrated as a system in package (SIP), providing significant size and cost reductions.
Keywords :
electrostatic actuators; printed circuits; programmable controllers; 1 to 50 pF; 10 to 300 V; MEMS actuators; electrostatic actuators; high voltage DMOS; low voltage CMOS; microelectromechanical systems; microprinted circuit board; programmable DC/DC converter; programmable microcontroller; system in package; CMOS technology; Control systems; DC-DC power converters; Diversity reception; Electrostatic actuators; Microcontrollers; Microelectromechanical systems; Micromechanical devices; Printed circuits; Voltage control;
Conference_Titel :
IEEE-NEWCAS Conference, 2005. The 3rd International
Print_ISBN :
0-7803-8934-4
DOI :
10.1109/NEWCAS.2005.1496677
