System integration of high voltage electrostatic MEMS actuators

Author

Saheb, Jean-François ; Richard, Jean-François ; Meingan, R. ; Sawan, M. ; Savaria, Y.

Author_Institution

Design & Product Foundry Service, DALSA Semicond. Inc., Bromont, Que., Canada

fYear

2005

Firstpage

155

Lastpage

158

Abstract

A system integration for high voltage (HV) electrostatic microelectromechanical systems (MEMS) actuators is introduced on a micro-printed circuit board (PCB). The system includes a programmable microcontroller, a programmable DC/DC converter, a multi output HV interface and electrostatic MEMS actuators. The system produces high output voltages (10-300V) and can control a large variety of MEMS capacitive loads (1 to 50pF) by combining diverse technologies. This system proves that technologies, such as low voltage CMOS of different processes, high voltage DMOS and MEMS, can interact, communicate and even be integrated as a system in package (SIP), providing significant size and cost reductions.

Keywords

electrostatic actuators; printed circuits; programmable controllers; 1 to 50 pF; 10 to 300 V; MEMS actuators; electrostatic actuators; high voltage DMOS; low voltage CMOS; microelectromechanical systems; microprinted circuit board; programmable DC/DC converter; programmable microcontroller; system in package; CMOS technology; Control systems; DC-DC power converters; Diversity reception; Electrostatic actuators; Microcontrollers; Microelectromechanical systems; Micromechanical devices; Printed circuits; Voltage control;

fLanguage

English

Publisher

ieee

Conference_Titel

IEEE-NEWCAS Conference, 2005. The 3rd International

Print_ISBN

0-7803-8934-4

Type

conf

DOI

10.1109/NEWCAS.2005.1496677

Filename

1496677