Title :
SnO2 based sensors of smoke
Author :
Brynzari, V. ; Dmitriev, S. ; Korotchenkov, G.
Author_Institution :
Lab. of Microelectron., Tech. Univ. of Moldova, Chisinau, Moldova
Abstract :
This paper presents results of investigations of smoke sensitive characteristics of gas sensors based on SnO2 thin films deposited on ceramic substrate by spray pyrolysis method. The temperature dependence of the resistance of such GS in a smoke atmosphere was studied. It was established that this dependence has two maximums of smoke sensitivity at 110-120°C and 230-250°C. The films have a sensitivity of about 15-60 arbitrary units of dependence on a smoke nature
Keywords :
gas sensors; pyrolysis; semiconductor materials; semiconductor thin films; smoke; tin compounds; 110 to 120 degC; 230 to 250 degC; SnO2; ceramic substrate; gas sensors; resistance temperature dependence; smoke sensitive characteristics; spray pyrolysis method; Combustion; Cotton; Dielectric measurements; Epoxy resins; Fires; Gas detectors; Hydrocarbons; Temperature dependence; Temperature sensors; Valves;
Conference_Titel :
Microelectronics, 1997. Proceedings., 1997 21st International Conference on
Conference_Location :
Nis
Print_ISBN :
0-7803-3664-X
DOI :
10.1109/ICMEL.1997.632902