Backside-illumination 14µm-pixel QVGA time-of-flight CMOS imager

Author

Oh, Min Seok ; Kong, Hae Kyung ; Lee, Han Soo ; Kim, Kyung Il ; Bae, Kwang Hyuk ; Kim, Soo Bang ; Kim, Sung Kwan ; Lim, Moo Sup ; Ahn, Jung Chak ; Kim, Tae Chan ; Hiroshige, Goto ; Kim, Seoung Hyun ; Min, Dong Ki ; Lee, And Yong Jei

Author_Institution

Syst. LSI, Samsung Electron., Kiheung, South Korea

fYear

2012

Firstpage

325

Lastpage

328

Abstract

This paper presents a BSI(backside-illumination) 14μm-pixel QVGA CMOS image sensor SOC(System On a Chip) measuring TOF(Time-Of-Flight) by 20MHz-intensity modulation of 850nm-wavelength light. The 34% of overall QE(Quantum Efficiency) at 850nm-wavelength is acquired by BSI structure and optimized micro-lens. The DE(Depth Error) less than 1.5% within 6m is achieved with imaging lens of f/1.2 and LED array of which the optical intensity is 0.6W/m² at 1m-distance. Additionally, the depth linearity is measured as that the coefficient of determination is equal to 0.9999. In order to operate under background light illumination on a scene, dual CG(Conversion Gain) scheme is implemented in each pixel.

Keywords

CMOS image sensors; intensity modulation; light emitting diodes; lighting; microlenses; optical modulation; sensor arrays; spatial variables measurement; system-on-chip; BSI structure; CG scheme; DE; LED array; QE; SOC; TOF measurement; backside-illumination QVGA time-of-flight CMOS imager; coefficient of determination; conversion gain scheme; depth error; depth linearity measurement; distance 1 m; efficiency 34 percent; frequency 20 MHz; imaging lens; intensity modulation; microlens optimization; optical intensity; quantum efficiency; size 6 m; system on a chip; wavelength 850 nm; Demodulation; Optical imaging; Optical modulation; Optical reflection; Optical sensors; Optical transmitters; Semiconductor device measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

New Circuits and Systems Conference (NEWCAS), 2012 IEEE 10th International

Conference_Location

Montreal, QC

Print_ISBN

978-1-4673-0857-1

Electronic_ISBN

978-1-4673-0858-8

Type

conf

DOI

10.1109/NEWCAS.2012.6329022

Filename

6329022