Title :
Thermally driven microvalve with buckling behaviour for pneumatic applications
Author :
Lisec, T. ; Hoerschelmann, S. ; Quenzer, H.J. ; Wagner, B. ; Benecke, W.
Author_Institution :
Fraunhofer-Inst. for Silicon Technol., Berlin, Germany
fDate :
6/16/1905 12:00:00 AM
Abstract :
The paper presents theoretical and experimental results of a new thermally driven microvalve. In contrast to earlier reported devices with bimorph composition this valve is based on the buckling effect of a heated pure silicon bridge structure. Simulation, fabrication and experimental results are presented. Analytical and finite-element calculations of the thermomechanical behaviour are performed. Prototypes of this first valve design operate with inlet pressures up to 1.0 bar showing flow rates of more than 700 ml/min. The measured switching time is about 15 ms which is extremely low for thermal principles. The power consumption of this valve is between 1 and 4 W
Keywords :
buckling; finite element analysis; microactuators; pneumatic control equipment; silicon; valves; 1 bar; 1 to 4 W; 15 ms; Si; buckling behaviour; fabrication; heated pure Si bridge structure; pneumatic applications; switching time; thermally driven microvalve; thermomechanical behaviour; Bridges; Fabrication; Finite element methods; Microvalves; Performance analysis; Prototypes; Silicon; Thermomechanical processes; Time measurement; Valves;
Conference_Titel :
Micro Electro Mechanical Systems, 1994, MEMS '94, Proceedings, IEEE Workshop on
Conference_Location :
Oiso
Print_ISBN :
0-7803-1833-1
DOI :
10.1109/MEMSYS.1994.555590
