SESES: a comprehensive MEMS modelling system

Author

Korvink, J.G. ; Funk, J. ; Roos, M. ; Wachutka, G. ; Baltes, H.

Author_Institution

Lab. for Phys. Electronics, Eidgenossische Tech. Hochschule, Zurich, Switzerland

fYear

1994

fDate

6/16/1905 12:00:00 AM

Firstpage

22

Lastpage

27

Abstract

We report recent advances made in building an integrated MEMS (Micro Electro Mechanical Systems) CAD, modelling system using the framework of SESES. It provides flexible coupling of electrical, thermal and mechanical deformation phenomena in a uniform and consistent environment. The system is tailored to the specific requirements of MEMS design. SESES achieves excellent computational accuracy and efficiency on engineering workstations using an automatic mesh adaptation algorithm in 2 and 3 dimensions and a super-fast linear solver. Near-optimal data structures enable meshes of ca. 100 000 finite elements to be solved on a workstation

Keywords

CAD; data structures; deformation; electrical engineering computing; finite element analysis; micromechanical devices; modelling; thermal analysis; CAD; FEM; MEMS modelling system; SESES; automatic mesh adaptation algorithm; electrical phenomena; engineering workstations; finite elements; mechanical deformation phenomena; micro electro mechanical systems; near-optimal data structures; super-fast linear solver; thermal phenomena; Couplings; Design automation; Differential equations; Electrostatics; Magnetostatics; Micromechanical devices; Nonlinear equations; Partial differential equations; Stress; Workstations;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 1994, MEMS '94, Proceedings, IEEE Workshop on

Conference_Location

Oiso

Print_ISBN

0-7803-1833-1

Type

conf

DOI

10.1109/MEMSYS.1994.555592

Filename

555592