Title :
SESES: a comprehensive MEMS modelling system
Author :
Korvink, J.G. ; Funk, J. ; Roos, M. ; Wachutka, G. ; Baltes, H.
Author_Institution :
Lab. for Phys. Electronics, Eidgenossische Tech. Hochschule, Zurich, Switzerland
fDate :
6/16/1905 12:00:00 AM
Abstract :
We report recent advances made in building an integrated MEMS (Micro Electro Mechanical Systems) CAD, modelling system using the framework of SESES. It provides flexible coupling of electrical, thermal and mechanical deformation phenomena in a uniform and consistent environment. The system is tailored to the specific requirements of MEMS design. SESES achieves excellent computational accuracy and efficiency on engineering workstations using an automatic mesh adaptation algorithm in 2 and 3 dimensions and a super-fast linear solver. Near-optimal data structures enable meshes of ca. 100 000 finite elements to be solved on a workstation
Keywords :
CAD; data structures; deformation; electrical engineering computing; finite element analysis; micromechanical devices; modelling; thermal analysis; CAD; FEM; MEMS modelling system; SESES; automatic mesh adaptation algorithm; electrical phenomena; engineering workstations; finite elements; mechanical deformation phenomena; micro electro mechanical systems; near-optimal data structures; super-fast linear solver; thermal phenomena; Couplings; Design automation; Differential equations; Electrostatics; Magnetostatics; Micromechanical devices; Nonlinear equations; Partial differential equations; Stress; Workstations;
Conference_Titel :
Micro Electro Mechanical Systems, 1994, MEMS '94, Proceedings, IEEE Workshop on
Conference_Location :
Oiso
Print_ISBN :
0-7803-1833-1
DOI :
10.1109/MEMSYS.1994.555592
