Title :
Micromechanisms and their characteristics
Author_Institution :
Dept. of Control and Syst. Eng., Toin Univ. of Yokohama, Japan
fDate :
6/16/1905 12:00:00 AM
Abstract :
As micromechanisms are a newly developed area, realization methods and applications are not clear. However these devices should have many possibilities. The author studied these devices from the mechanical engineering viewpoint and tested many kinds of models of the micromechanisms. As a result some characteristics and the research assignments of a micromechanism were clarified. An outline of these developments is given
Keywords :
micromechanical devices; semiconductor technology; mechanical engineering; micromechanical devices; micromechanisms; models; research assignments; travelling mechanisms; Control systems; Electrostatic measurements; Gears; Humans; Mechanical variables measurement; Micromotors; Microorganisms; Silicon; Systems engineering and theory; Testing;
Conference_Titel :
Micro Electro Mechanical Systems, 1994, MEMS '94, Proceedings, IEEE Workshop on
Conference_Location :
Oiso
Print_ISBN :
0-7803-1833-1
DOI :
10.1109/MEMSYS.1994.555595
