Title :
Full automatic on the fly optical macro wafer edge inspection system
Author :
Kirmizigül, Denis ; Fröhlich, Heiko
Author_Institution :
Inst. of Artificial Intell., Dresden Univ. of Technol., Dresden, Germany
Abstract :
We present a low cost optical macro inspection system for the wafer edge. The system is able to inspect the full wafer edge (front-, backside and apex) and provides a short feedback loop to the unit processes. Furthermore the use of image processing methods enables inspection without additional time loss. This inspection system can be installed on all wafer rotating tools with free space for hardware installation.
Keywords :
automatic optical inspection; edge detection; feedback; industrial robots; materials handling; feedback loop; image processing method; low cost optical macro wafer edge inspection system; wafer rotating tool; Cameras; Copper; Image color analysis; Image edge detection; Inspection; Probability distribution; Robot vision systems;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference (ASMC), 2011 22nd Annual IEEE/SEMI
Conference_Location :
Saratoga Springs, NY
Print_ISBN :
978-1-61284-408-4
Electronic_ISBN :
1078-8743
DOI :
10.1109/ASMC.2011.5898170
