Title :
Novel method of keeping constant temperature in nano actuator performance measurement
Author :
Jiang Bing ; Wang Jungang ; Chen Hong ; Cao Kun ; Wang Qiang ; Yang Sheng
Author_Institution :
Coll. of Autom., Nanjing Univ. of Posts & Telecommun., Nanjing, China
Abstract :
To guarantee the accuracy of nanometer displacement measurement, the high-precision control on the temperature of measuring environment must be carried out. In order to meet the practical needs of nanometer displacement measurement, a new concept which is constant temperature time window has been brought forward, as well as a low cost but high-precision project based on the concept. Preliminary research indicates that the realization of 0.001°C constant temperature precision and one-minute measurement interval is easy as long as the cover has good sealing performance even with common adiabatic materials. The measured static characteristics of the great-driving-force and high-rigidity nano actuator prototype show that the control system based on constant temperature time window principle mentioned in this paper could meet the practical needs of nanometer displacement measurement.
Keywords :
actuators; displacement measurement; precision engineering; prototypes; seals (stoppers); temperature control; adiabatic materials; constant temperature keeping method; constant temperature precision; constant temperature time window; great-driving-force prototype; high-precision project; high-precision temperature control; high-rigidity nanoactuator prototype; nanoactuator performance measurement; nanometer displacement measurement; one-minute measurement interval; static characteristics; Actuators; Displacement measurement; Temperature; Temperature control; Temperature measurement; Temperature sensors; Time measurement; constant temperature time window; nano actuator; nanometer displacement measurement;
Conference_Titel :
Control Conference (CCC), 2013 32nd Chinese
Conference_Location :
Xi´an
