• DocumentCode
    1725171
  • Title

    Substrate cleaning using ultrasonics/megasonics

  • Author

    Kazemi, Mohammad ; Treichel, Helmuth ; Ligutom, Rito

  • Author_Institution
    Xyratex Int. Inc., Fremont, CA, USA
  • fYear
    2011
  • Firstpage
    1
  • Lastpage
    6
  • Abstract
    The adhesion and detachment forces acting on spherical particles attached to a substrate is investigated. It is found that alumina particles larger than 50 nm and glass particles larger than 10 nm can be successfully dislodged by acoustic waves in an ultrasonic tank. Inspection of detachment forces reveals that the dominant detachment force is acoustic cavitation force for particles larger than 35 nm (f = 950 kHz).
  • Keywords
    acoustic waves; adhesion; alumina; cavitation; glass; inspection; ultrasonic cleaning; Al2O3; SiO2; acoustic cavitation force; acoustic waves; adhesion forces; alumina particles; detachment forces; frequency 950 kHz; glass particles; inspection; megasonics; spherical particles; substrate cleaning; ultrasonic tank; Acoustics; Adhesives; Equations; Force; Mathematical model; Substrates; Transducers; Acoustic Cavitation; Acoustic streaming; Particle Removal; Ultrasonics/Megasonics; Van der Waals Force;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Advanced Semiconductor Manufacturing Conference (ASMC), 2011 22nd Annual IEEE/SEMI
  • Conference_Location
    Saratoga Springs, NY
  • ISSN
    1078-8743
  • Print_ISBN
    978-1-61284-408-4
  • Electronic_ISBN
    1078-8743
  • Type

    conf

  • DOI
    10.1109/ASMC.2011.5898185
  • Filename
    5898185
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1725171