Title :
Yp — Ypk: Product test yield and yield dispersion indicators
Author :
Bostelmann, Matthias T.
Author_Institution :
Characterization Dept., ALTIS Semicond., Corbeil-Essonnes, France
Abstract :
Product test results deliver multiple data about yield and detractors, comprising their centering and dispersions. They present a challenge for information delivery, in particular when the data ranges imply more than 3 orders of magnitude. To visualize them in a “at-a-glance” or “one-shot” dashboard, we present Yp and Ypk as a practical solution. This set of indicators Yp and Ypk is calculated relative to a best-can-do real-world reference. First examples illustrate the effectiveness of the method.
Keywords :
data mining; manufacturing data processing; production engineering computing; production testing; semiconductor device manufacture; Yp-Ypk; data management; data mining; information delivery; product test; semiconductor manufacturing; yield dispersion indicator; Data visualization; Dispersion; Manufacturing; Monitoring; Probes; Redundancy; Visualization; DM Data Management and Data Mining Tools; Yp Ypk; dashboard; new visualization method;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference (ASMC), 2011 22nd Annual IEEE/SEMI
Conference_Location :
Saratoga Springs, NY
Print_ISBN :
978-1-61284-408-4
Electronic_ISBN :
1078-8743
DOI :
10.1109/ASMC.2011.5898189
