DocumentCode
1725294
Title
Simple microflight mechanism on silicon wafer
Author
Shimoyama, Isao ; Kubo, Yayoi ; Kaneda, Tomoyuki ; Miura, Hirofumi
Author_Institution
Dept. of Mech. Eng., Tokyo Univ., Japan
fYear
1994
fDate
6/16/1905 12:00:00 AM
Firstpage
148
Lastpage
152
Abstract
Flying is an advantageous method of mobility for a microscale machine due to the scale effect. Insects have evolved through natural selection, so they have fascinating structures and functions which are good models for a micromachine, especially in regard to microflight. A flying micromechanism is discussed, including its structure, actuators, power supply, and dynamics. One such 3D flying mechanism microstructure has been made
Keywords
micromechanical devices; 3D flying mechanism microstructure; Si; Si wafer; actuators; dynamics; flying micromechanism; microflight mechanism; micromachine; microscale machine; mobility; models; power supply; Actuators; Frequency; Insects; Mobile robots; Muscles; Organisms; Resonance; Robot sensing systems; Silicon; Wheels;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 1994, MEMS '94, Proceedings, IEEE Workshop on
Conference_Location
Oiso
Print_ISBN
0-7803-1833-1
Type
conf
DOI
10.1109/MEMSYS.1994.555614
Filename
555614
Link To Document