DocumentCode :
1725347
Title :
Data mining using PLS-trees and other projection methods
Author :
Byrne, Tamara ; Wold, Svante
Author_Institution :
MKS Instrum., Umetrics, Inc., San Jose, CA, USA
fYear :
2011
Firstpage :
1
Lastpage :
5
Abstract :
The amount of data measured during a typical manufacturing process is immense. To efficiently utilize these data without becoming overwhelmed with confusing and often conflicting information is difficult to impossible when using traditional univariate methods. Multivariate data mining methods can be used to examine large data sets by extracting relationships between variables to highlight variable correlations and deviations. Specifically, PLS-trees can be used to quickly identify significant clusters in large datasets and to highlight the differences within the groups.
Keywords :
data mining; tree data structures; PLS trees; data mining; manufacturing process; Data mining; Data models; Predictive models; Principal component analysis; Process control; Semiconductor device modeling; Semiconductor process modeling; Cluster analysis; PCA; PLS; multivariate; time series data;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Advanced Semiconductor Manufacturing Conference (ASMC), 2011 22nd Annual IEEE/SEMI
Conference_Location :
Saratoga Springs, NY
ISSN :
1078-8743
Print_ISBN :
978-1-61284-408-4
Electronic_ISBN :
1078-8743
Type :
conf
DOI :
10.1109/ASMC.2011.5898193
Filename :
5898193
Link To Document :
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