Title :
Development of polysilicon TFTs for 16 MB SRAMs and beyond
Author :
Batra, S. ; Maddox, R. ; Tran, L. ; Manning, M. ; Dennison, C. ; Fazan, P.
Author_Institution :
Micron Semiconductor, Inc.
fDate :
6/15/1905 12:00:00 AM
Keywords :
Crystallization; Degradation; Dielectrics; Grain size; Implants; Microstructure; Random access memory; Solids; Stability; Thin film transistors;
Conference_Titel :
Device Research Conference, 1993. 51st Annual
DOI :
10.1109/DRC.1993.1009597
