Title :
A 3-D sidewall flash EPROM cell and memory array
Author :
Pein, Howard ; Plummer, James D.
Author_Institution :
Center for Integrated Systems, Stanford University
fDate :
6/15/1905 12:00:00 AM
Keywords :
Circuits; EPROM; Etching; Geometry; Nonvolatile memory; Secondary generated hot electron injection; Silicon; Threshold voltage; Transistors; Wire;
Conference_Titel :
Device Research Conference, 1993. 51st Annual
DOI :
10.1109/DRC.1993.1009599
