DocumentCode :
1725552
Title :
Excimer-laser crystallized poly-Si TFTs with mobility of more than 600cm2/Vs
Author :
Choi, D.H. ; Sadayuki, E. ; Sugiura, O. ; Matsumura, M.
Author_Institution :
Tokyo Institute of Technology
fYear :
1993
fDate :
6/15/1905 12:00:00 AM
Firstpage :
109
Lastpage :
110
Keywords :
Artificial intelligence; Biomembranes; Crystallization; Etching; Grain boundaries; Semiconductor films; Substrates; Temperature; Thin film transistors; Voltage;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Device Research Conference, 1993. 51st Annual
Type :
conf
DOI :
10.1109/DRC.1993.1009603
Filename :
1009603
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1725552
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