• DocumentCode
    1725552
  • Title

    Excimer-laser crystallized poly-Si TFTs with mobility of more than 600cm2/Vs

  • Author

    Choi, D.H. ; Sadayuki, E. ; Sugiura, O. ; Matsumura, M.

  • Author_Institution
    Tokyo Institute of Technology
  • fYear
    1993
  • fDate
    6/15/1905 12:00:00 AM
  • Firstpage
    109
  • Lastpage
    110
  • Keywords
    Artificial intelligence; Biomembranes; Crystallization; Etching; Grain boundaries; Semiconductor films; Substrates; Temperature; Thin film transistors; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Device Research Conference, 1993. 51st Annual
  • Type

    conf

  • DOI
    10.1109/DRC.1993.1009603
  • Filename
    1009603
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1725552