Investigation of insulator electron beam charging effects and related breakdown phenomena

Author

Vallayer, B. ; Legressus, C. ; Blaise, G. ; Treheux, D.

Author_Institution

Ecole Centrale de Lyon, CNRS, Ecully, France

fYear

1992

Firstpage

43

Lastpage

48

Abstract

Insulators are charged under electron bombardment and the variation of potential V is measured as a function of the electron dose D. Three cases are observed: (1) V is proportional to D; (2) V reaches a plateau; and (3) the V(D) curve shows various extrema. These are respectively interpreted as: (1) due to a stable implanted charge in the electron voltage range used to charge the sample; (2) due to the appearance of a steady-state leakage current occuring when a critical space charge is reached; and (3) due to structural modifications of the material. These interpretations are supported by electrostatic calculations combined with electron microscopy experiments

Keywords

electric breakdown of solids; electron beam effects; electron microscope examination of materials; electrostatics; insulation; leakage currents; space charge; breakdown phenomena; critical space charge; electron beam charging; electron bombardment; electron dose; electron microscopy; electrostatic calculations; grain boundaries; implanted charge; steady-state leakage current; structural modifications; Current measurement; Electric breakdown; Electron beams; Electron traps; Focusing; Insulation; Leakage current; Space charge; Steady-state; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Electrical Insulation and Dielectric Phenomena, 1992. Annual Report. Conference on

Conference_Location

Victoria, BC

Print_ISBN

0-7803-0565-5

Type

conf

DOI

10.1109/CEIDP.1992.283251

Filename

283251