Title :
A SOM approach to the failure physics of optoelectronic devices
Author :
Montangero, Paolo ; Azzini, Giuseppe A. ; Liberatore, Michele ; Mancini, Maria ; Pederzini, Elisa ; Serra, Laura
Author_Institution :
Centro Studi e Lab. Telecommunicazioni SpA, Torino, Italy
Abstract :
The use of optical beam induced current (OBIC) and photoluminescence (PL) implemented in a scanning optical microscope (SOM) for the study of the degradation mechanisms of optoelectronic devices is discussed. High sensitivity and spatial resolution in the localization of defects are demonstrated, unique analytical schemes are described, and the cofocal photoluminescence (CPL) technique is introduced. Theoretical analysis and computations support the experimental results.<>
Keywords :
OBIC; failure analysis; optical microscopy; optoelectronic devices; photoluminescence; reliability; semiconductor device testing; OBIC; cofocal photoluminescence; defects localisation; degradation mechanisms; failure physics; optical beam induced current; optoelectronic devices; scanning optical microscope; spatial resolution; Degradation; Optical beams; Optical filters; Optical microscopy; Optical sensors; Optoelectronic devices; Photoluminescence; Physics; Scanning electron microscopy; Transmission electron microscopy;
Conference_Titel :
Reliability Physics Symposium, 1993. 31st Annual Proceedings., International
Conference_Location :
Atlanta, GA, USA
Print_ISBN :
0-7803-0782-8
DOI :
10.1109/RELPHY.1993.283271
