Title :
A micromachined polyimide aperture for stable bilayer lipid membrane (BLM)s
Author :
Eray, Mete ; Dogan, Nurmn S. ; Liu, Liangjun ; Koch, Alan R. ; Moffett, David F. ; Silber, Maris ; Van Wie, Bemard J.
Author_Institution :
School of Electrical Engineering & Computer Science, Washington State University
fDate :
6/15/1905 12:00:00 AM
Keywords :
Apertures; Biomembranes; Biosensors; Cleaning; Etching; Lipidomics; Planarization; Polyimides; Silicon; Stability;
Conference_Titel :
Device Research Conference, 1993. 51st Annual
DOI :
10.1109/DRC.1993.1009616
