DocumentCode :
1725905
Title :
Demonstration of monolithic Co-fabrication of Y
1
Ba
2
Cu
3
O
7-δ
and CMOS devices on the same sapphire substrate
Author :
de la Houssaye, P.R. ; Burns, M.J. ; Ruby, W.J. ; Russell, S.D. ; Clayton, S.R. ; Garcia, G.A. ; Lee, L.P.
Author_Institution :
Conductus, Inc.
fYear :
1993
fDate :
6/15/1905 12:00:00 AM
Firstpage :
148
Lastpage :
149
Keywords :
CMOS process; Fabrication; High temperature superconductors; Integrated circuit interconnections; SQUIDs; Silicon; Substrates; Superconducting devices; Superconducting films; Yttrium barium copper oxide;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Device Research Conference, 1993. 51st Annual
Type :
conf
DOI :
10.1109/DRC.1993.1009619
Filename :
1009619
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1725905
