Title :
RF-magnetron sputtering of piezoelectric lead-zirconate-titanate actuator films using composite targets
Author :
Abe, Takeshi ; Reed, Michael L.
Author_Institution :
Dept. of Electr. & Comput. Eng., Carnegie Mellon Univ., Pittsburgh, PA, USA
fDate :
6/16/1905 12:00:00 AM
Abstract :
Piezoelectric lead-zirconate-titanate (PZT) thin films of the morphotropic composition, suitable for microelectromechanical applications, are fabricated by means of RF-magnetron sputtering using a composite target, followed by an in situ annealing treatment. Increasing the thickness prevents the film from severe crack formation during the annealing process. Remnant polarization, coercive field, and relative dielectric constant of the films are 9.7 μ/cm2 170 kV/cm and 930, respectively. The piezoelectric constant d31 is estimated to be -49 pC/N. A practical microvalve application for volumetric gas flow measurement using the piezoelectric actuators is briefly described
Keywords :
sputter deposition; PZT; PZT thin films; PbZrO3TiO3; RF-magnetron sputtering; annealing; coercive field; composite target; composite targets; crack formation; crystal structure; in situ annealing treatment; microelectromechanical applications; microvalve application; morphotropic composition; piezoelectric constant; piezoelectric lead-zirconate-titanate actuator films; relative dielectric constant; remnant polarization; volumetric gas flow measurement; Annealing; Dielectric constant; Dielectric measurements; Dielectric thin films; Fluid flow; Fluid flow measurement; Microvalves; Piezoelectric films; Piezoelectric polarization; Sputtering;
Conference_Titel :
Micro Electro Mechanical Systems, 1994, MEMS '94, Proceedings, IEEE Workshop on
Conference_Location :
Oiso
Print_ISBN :
0-7803-1833-1
DOI :
10.1109/MEMSYS.1994.555617
