Title :
Design and fabrication of multi-metal electrodes implanted PDMS structures for micro flow devices using 3-D assembly
Author :
Ishizuka, M. ; Abe, M. ; Houjou, H. ; Shoji, S. ; Mizuno, J. ; Tsutsui, K. ; Wada, Y.
Author_Institution :
Dept. of Electron., Inf. & Commun. Eng., Waseda Univ., Tokyo, Japan
Abstract :
3-D metal embedded structure was realized by folding PDMS structure. Accurate angle of 90 degree between the each electrodes are obtained using the guide structure. A fluoro resin on the metal layer was used to avoid the clack resulting from residual stress and also to protect from organic solvent generating during photolithography. By applying high electric field of 2000 V/cm on facing electrodes, the static field effect on styrene polymer micro sphere is confirmed.
Keywords :
microelectrodes; microfluidics; photolithography; polymers; self-assembly; 3D assembly; PDMS structure; fluoro resin; guide structure; metal layer; microflow devices; multi-metal electrodes; organic solvent; photolithography; residual stress; static field effect; styrene polymer microsphere; Assembly; Chemical analysis; Electrodes; Fabrication; Fluidic microsystems; Inductors; Microchannel; Microfluidics; Silicon; Transducers;
Conference_Titel :
TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-7731-1
DOI :
10.1109/SENSOR.2003.1216936
