Design and fabrication of multi-metal electrodes implanted PDMS structures for micro flow devices using 3-D assembly

Author

Ishizuka, M. ; Abe, M. ; Houjou, H. ; Shoji, S. ; Mizuno, J. ; Tsutsui, K. ; Wada, Y.

Author_Institution

Dept. of Electron., Inf. & Commun. Eng., Waseda Univ., Tokyo, Japan

Volume

2

fYear

2003

Firstpage

999

Abstract

3-D metal embedded structure was realized by folding PDMS structure. Accurate angle of 90 degree between the each electrodes are obtained using the guide structure. A fluoro resin on the metal layer was used to avoid the clack resulting from residual stress and also to protect from organic solvent generating during photolithography. By applying high electric field of 2000 V/cm on facing electrodes, the static field effect on styrene polymer micro sphere is confirmed.

Keywords

microelectrodes; microfluidics; photolithography; polymers; self-assembly; 3D assembly; PDMS structure; fluoro resin; guide structure; metal layer; microflow devices; multi-metal electrodes; organic solvent; photolithography; residual stress; static field effect; styrene polymer microsphere; Assembly; Chemical analysis; Electrodes; Fabrication; Fluidic microsystems; Inductors; Microchannel; Microfluidics; Silicon; Transducers;

fLanguage

English

Publisher

ieee

Conference_Titel

TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003

Conference_Location

Boston, MA, USA

Print_ISBN

0-7803-7731-1

Type

conf

DOI

10.1109/SENSOR.2003.1216936

Filename

1216936