Title :
Scanning probe with elastomeric (PDMS) tip for scanning probe microcontact printing (SP-CP)
Author :
Xuefeng Wang ; Kee Ryu ; Bullen, D. ; Jun Zou ; Mirkin, C. ; Chang Liu
Author_Institution :
Dept. of Electr. & Comput. Eng., Illinois Univ., Urbana, IL, USA
Abstract :
This paper reports a newly developed scanning probe microcontact printing (SP-/spl mu/CP) method to generate submicron patterns. It uses a scanning probe with an elastomeric tip to transfer chemical or biological materials onto a substrate. SP-/spl mu/CP combines the advantages of microcontact printing and scanning probe microscopy technologists. The design and fabrication of the scanning probe is described in this work. The functioning of the probe is demonstrated by generation of sub-500 nm ODT lines on a gold surface using SP-/spl mu/CP method.
Keywords :
elastomers; lithography; micromachining; printing; 500 nm; biological material; chemical material; elastomeric PDMS tip; gold surface; microcontact printing; scanning probe; scanning probe microcontact printing; scanning probe microscopy; Biological materials; Chemicals; Fabrication; Ink; Nanobioscience; Printing; Scanning probe microscopy; Self-assembly; Soft lithography; Solids;
Conference_Titel :
TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-7731-1
DOI :
10.1109/SENSOR.2003.1216937
