Pneumatic two-dimensional conveyance system for autonomous distributed MEMS

We have proposed a micro conveyance system, which is based on the autonomous distributed MEMS. A controlling method suitable for our system has also been proposed. To realize a conveyance part of the system, we have developed an array of air-flow micro actuator by bulk micromachining technology. One-dimensional conveyance of a small object (2.1 mm/spl times/4.1 mm, approximately 4 mg weigh) was demonstrated with the help of the air-flow (17 kPa). A two-dimensional system composed of 560 micro actuators in a 35 mm/spl times/35 mm area was realized. Almost all the actuators were successfully driven by electrostatic force. We have achieve levitation-motion and transfer-motion of the object nevertheless full control of two-dimensional conveyance is under trial. We have also developed an integrated circuit composed of an array of sensors and processors by 0.8 /spl mu/m-rule CMOS fabrication process. The circuit works as a distributed processing system to recognize a shape of a micro object. Assembling of the present actuator array with control circuits is in progress.