Title :
Novel fused sensor for photo and ion sensing
Author :
Sawada, K. ; Ohshina, T. ; Hizawa, T. ; Takao, H. ; Ishida, M.
Author_Institution :
Dept. of Electr. & Electron. Eng., Toyohashi Univ. of Technol., Japan
Abstract :
A novel sensor array, which is fused photo-sensors and ion sensors, is proposed and the prototype one was successively fabricated using a CMOS process. On the proposed sensor, a photo sensor and an ion sensor are fused in a same pixel, and photo-signal and ion concentration density are detected in a same sensing area and a same time. Therefore, relationship between light distribution and ion distribution will be clear by using this novel sensor array. The input light power dependences of the photo sensing part were measured, and it can be found that the output signals are proportional to the input light power and there is no influence of the pH value in solutions. The dependences on pH signal were also investigated. It is also found that there is no influence of the light intensity.
Keywords :
ion sensitive field effect transistors; optical sensors; pH; sensor fusion; CMOS process; ion concentration density; ion sensing; ion sensor; light power dependence; pH; photosensing; photosensor; photosignal; pixel; CMOS process; Charge coupled devices; Chemical analysis; Chemical lasers; Chemical sensors; Current measurement; Electrodes; Fluorescence; Sensor arrays; Sensor fusion;
Conference_Titel :
TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-7731-1
DOI :
10.1109/SENSOR.2003.1216942
